Plasma vacuum ultraviolet emission in an electron cyclotron resonance etcher

TE 01 Excitation of an Electron Cyclotron Resonance Plasma Source

The uniformity of plasma generation in electron cyclotron resonance (ECR) reactors for materials processing, and the subsequent uniformity of fluxes to the substrate, are generally a function of the mode of the microwave radiation injected into the chamber. In this paper, a finite difference time domain (FDTD) simulation is used to demonstrate the consequences of exciting an ECR reactor using a...

A study on vacuum aspects of electron cyclotron resonance ion source plasma

The electron cyclotron resonance (ECR) ion source is special type hot plasma machine where the high temperature electrons co-exist with multiply charge state ions and neutrals. A few years ago 6.4 GHz. ECR ion source (VEC-ECR) was developed indigenously at VECC. This multiply charged ion source is being used continuously to inject heavy ion beams into the cyclotron. Vacuum plays the major role ...

Plasma expansion from a dielectric electron cyclotron resonance source

The boundary conditions in an electron cyclotron resonance (ECR) source have been modified to mimic the operating conditions where current-free double-layers (DLs) have been recently measured in rf helicon plasmas. The plasma is heated or generated by the ECR at 875 G inside a dielectric source tube, and expands into a grounded diffusion chamber (terminated by a glass plate) by a rapidly decrea...

Electron Cyclotron Resonance Ion Source

Electron Cyclotron Resonance Ion Source